JPH0197138U - - Google Patents
Info
- Publication number
- JPH0197138U JPH0197138U JP19155887U JP19155887U JPH0197138U JP H0197138 U JPH0197138 U JP H0197138U JP 19155887 U JP19155887 U JP 19155887U JP 19155887 U JP19155887 U JP 19155887U JP H0197138 U JPH0197138 U JP H0197138U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- super clean
- room
- worker
- super
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19155887U JPH0197138U (en]) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19155887U JPH0197138U (en]) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197138U true JPH0197138U (en]) | 1989-06-28 |
Family
ID=31482463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19155887U Pending JPH0197138U (en]) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197138U (en]) |
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1987
- 1987-12-17 JP JP19155887U patent/JPH0197138U/ja active Pending